SPIE Advanced Lithography Symposium Postscript

It is 10 days since the SPIE Advanced Lithography Symposium, and I have finally finished and submitted all my papers!  If you are interested in any of them, you can find them on the Fractilia website here:


Note that for the tutorial talk I gave I will not be preparing a paper, but you can get a copy of the slides I presented.  And for those you who didn’t attend the talk, this is the way it ended:


One thought on “SPIE Advanced Lithography Symposium Postscript”

  1. Thank you for posting the papers! Will you also be posting the manuscript/slides for “Line-edge roughness (LER) performance targets for EUV lithography” ?

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