SPIE Advanced Lithography 2015 – day 0

2015 is the International Year of Light (light2015.org) and it has gotten me thinking about anniversaries. Two hundred years ago Fresnel developed his diffraction theory, 150 years ago Maxwell finished his electrodynamics, 100 years ago Einstein published his General Relativity, and 50 years ago Gordon Moore wrote an article that gave birth to Moore’s Law (and lithographers have not been the same since). SPIE itself was begun in 1955 and so is celebrating its 60th birthday, and this is the 40th time the Advanced Lithography symposium has met. It is a year of personal anniversaries as well. Thirty years ago I gave my first paper at this conference, 25 years ago I start FINLE Technologies, released the first commercial version of PROLITH, and had my first bathtub party at this conference, 15 years ago I sold FINLE to KLA-Tencor, and 10 years ago I retired into the life of a Gentleman Scientist. Is there anything special in store for 2015 in the world of lithography? We will have to see.

Here are some of the things that I’m hoping to learn this year.

Directed Self-Assembly (DSA): Is it in manufacturing yet? Will it be this year?
Nanoimprint Lithography (NIL): Will Toshiba put it into manufacturing this year?
3D Flash: Will it ramp this year? Will someone other than Samsung announce production?
Extreme Ultraviolet (EUV): Will we reach 100W by the end of the year?

I expect the announcement from ASML to be that they’ve already achieved more than 100W, but we have to listen closely for the details. A bench demonstration is important, but what I look for is demonstrations at a customer site. Alas, the first paper that ASML will give on this topic, Tuesday morning at 8am, is at the same time as a paper I am giving, so I won’t be able to attend. Maybe one or two of my loyal readers could send me their impressions (if they choose to attend the EUV session instead of my talk!).

The Bet. Six years ago at this conference I made a bet with Vivek Bakshi about when (or if) EUV would be used in manufacturing. Apparently, after having a bit too much to drink, I bet my Lotus that EUV would not be ready for manufacturing by the end of 2014. Well, it’s 2015. Who won the bet? Let’s just say I still have my Lotus. For a complete telling of the story, go here: www.lithoguru.com/scientist/essays/thebet.html

I hope to see you in San Jose!

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